Embedded contamination induced by etching in E-beam deposited silica: A possible precursor to laser damage

Russell Dent; Brittany N. Hoffman; Alexei A. Kozlov; Nan Liu; Amy L. Rigatti; Stavros G. Demos; Alexander A. Shesopalov

doi:10.1117/12.2597975

12 October 2021 Embedded contamination induced by etching in E-beam deposited silica: A possible precursor to laser damage

Russell Dent, Brittany N. Hoffman, Alexei A. Kozlov, Nan Liu, Amy L. Rigatti, Stavros G. Demos, Alexander A. Shesopalov

Author Affiliations +

Proceedings Volume 11910, Laser-Induced Damage in Optical Materials 2021; 1191014 (2021) https://doi.org/10.1117/12.2597975
Event: SPIE Laser Damage, 2021, Online Only

Abstract

We investigate contamination induced in grating-like structures during the etching process as a possible precursor to laser-induced damage. Our experimental model utilizes 5-mm line structures fabricated in E-beam–deposited coatings of silica using reactive ion etching (RIE) and reactive ion beam etching (RIBE). This makes it possible to compare the behavior in the pillars and trench regions. The results suggest that surface contaminants are primarily fluorinated polymers, while embedded contaminants consist primarily of carbon with very low detection of fluorine. Samples fabricated by the RIBE method exhibit significantly reduced roughness in the trenches, yet still present similar embedded contamination.

Conference Presentation

Citation Download Citation

Russell Dent, Brittany N. Hoffman, Alexei A. Kozlov, Nan Liu, Amy L. Rigatti, Stavros G. Demos, and Alexander A. Shesopalov "Embedded contamination induced by etching in E-beam deposited silica: A possible precursor to laser damage", Proc. SPIE 11910, Laser-Induced Damage in Optical Materials 2021, 1191014 (12 October 2021); https://doi.org/10.1117/12.2597975

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available