Updated methods for precise blaze angle measurements of lithographically fabricated silicon immersion gratings

Emily G. Lubar; Daniel T. Jaffe; Gregory N. Mace; Cynthia B. Brooks; Matthew N. Jacobs; Erica Sawczynec

doi:10.1117/12.2630157

29 August 2022 Updated methods for precise blaze angle measurements of lithographically fabricated silicon immersion gratings

Emily G. Lubar, Daniel T. Jaffe, Gregory N. Mace, Cynthia B. Brooks, Matthew N. Jacobs, Erica Sawczynec

Author Affiliations +

Proceedings Volume 12188, Advances in Optical and Mechanical Technologies for Telescopes and Instrumentation V; 121885A (2022) https://doi.org/10.1117/12.2630157
Event: SPIE Astronomical Telescopes + Instrumentation, 2022, Montréal, Québec, Canada

Conference Poster

Abstract

This conference presentation was prepared for the Advances in Optical and Mechanical Technologies for Telescopes and Instrumentation V conference at SPIE Astronomical Telescopes + Instrumentation, 2022.

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Emily G. Lubar, Daniel T. Jaffe, Gregory N. Mace, Cynthia B. Brooks, Matthew N. Jacobs, and Erica Sawczynec "Updated methods for precise blaze angle measurements of lithographically fabricated silicon immersion gratings", Proc. SPIE 12188, Advances in Optical and Mechanical Technologies for Telescopes and Instrumentation V, 121885A (29 August 2022); https://doi.org/10.1117/12.2630157

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