Study on the releasing process of tilted grating structure for AR glasses using nanoimprint

Y. Hirai; Y. Kunitou; M. Yasuda

doi:10.1117/12.2658431

30 April 2023 Study on the releasing process of tilted grating structure for AR glasses using nanoimprint

Y. Hirai, Y. Kunitou, M. Yasuda

Proceedings Volume 12497, Novel Patterning Technologies 2023; 124970U (2023) https://doi.org/10.1117/12.2658431
Event: SPIE Advanced Lithography + Patterning, 2023, San Jose, California, United States

Conference Poster

Abstract

Tilted diffraction gratings with highly refractive will be an important element for smart glass to realize a metaverse such as AR (Augmented Reality)/VR (Virtual Reality). Nanoimprinting, which can directly process a variety of materials for a variety of shapes, is well suited for mass production of tilted gratings, and many approaches have been reported. In nanoimprinting, one of the keys is to release the gradient grating shape without defects. In this report, we analyzed the strain generated during peeling release and tear release by computer simulation, and investigated a low-damage peeling method for releasing the tilted structure.

Citation Download Citation

Y. Hirai, Y. Kunitou, and M. Yasuda "Study on the releasing process of tilted grating structure for AR glasses using nanoimprint", Proc. SPIE 12497, Novel Patterning Technologies 2023, 124970U (30 April 2023); https://doi.org/10.1117/12.2658431

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