Paper
12 December 2022 1 x 9 MMI splitter prepared by 3D lithography and characterized by NSOM
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Proceedings Volume 12502, 22nd Polish-Slovak-Czech Optical Conference on Wave and Quantum Aspects of Contemporary Optics; 125020Q (2022) https://doi.org/10.1117/12.2664185
Event: 22nd Polish-Slovak-Czech Optical Conference on Wave and Quantum Aspects of Contemporary Optics, 2022, Wojanow, Poland
Abstract
We proposed, simulated and fabricated a new type of three-dimensional (3D) optical splitter based on multimode interference (MMI). Splitter was designed for the wavelength of 1550 nm and the input signal is divided into 9 outputs. The multimode waveguide part of the splitter was designed as a block with square basis of cross-section of 26 x 26 μm2 and length of 211 μm. We used the IP-Dip polymer as a standard material for 3D laser lithography. We present the design, simulated and measured optical field distribution in the output of the MMI splitter and its direct integration on the single mode optical fiber.
© (2022) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Peter Gašo, Tomas Mizera, Dusan Pudis, Martin Ziman, and Daniel Jandura "1 x 9 MMI splitter prepared by 3D lithography and characterized by NSOM", Proc. SPIE 12502, 22nd Polish-Slovak-Czech Optical Conference on Wave and Quantum Aspects of Contemporary Optics, 125020Q (12 December 2022); https://doi.org/10.1117/12.2664185
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KEYWORDS
Lithography

Near field scanning optical microscopy

Near field optics

Polymers

Photonics

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