Laser drilling controlled by laser-generated sound

Sotaro Komatsu; Takuma Miura; Yoshio Hayasaki

doi:10.1117/12.2673898

15 August 2023 Laser drilling controlled by laser-generated sound

Sotaro Komatsu, Takuma Miura, Yoshio Hayasaki

Proceedings Volume 12618, Optical Measurement Systems for Industrial Inspection XIII; 1261808 (2023) https://doi.org/10.1117/12.2673898
Event: SPIE Optical Metrology, 2023, Munich, Germany

Abstract

Femtosecond laser processing is useful for drilling micro holes in many kinds of materials. The laser parameters according to the material should be carefully selected, but the procedure is time-consuming. In-process monitoring, which allows observation of the processed structure while real-time feedback of processing parameters, is necessary to reduce processing time. In this study, the laser-excited sound wave is used for controlling the axial position of the object lens in hole drilling.

Conference Presentation

Citation Download Citation

Sotaro Komatsu, Takuma Miura, and Yoshio Hayasaki "Laser drilling controlled by laser-generated sound", Proc. SPIE 12618, Optical Measurement Systems for Industrial Inspection XIII, 1261808 (15 August 2023); https://doi.org/10.1117/12.2673898

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