Efficient representation of full mask density maps in advanced mask data preparation flows

Rachit Sharma; Ingo Bork; Archana Rajagopalan; Kushlendra Mishra; Mary Zuo

doi:10.1117/12.2687511

21 November 2023 Efficient representation of full mask density maps in advanced mask data preparation flows

Rachit Sharma, Ingo Bork, Archana Rajagopalan, Kushlendra Mishra, Mary Zuo

Proceedings Volume 12751, Photomask Technology 2023; 127511C (2023) https://doi.org/10.1117/12.2687511
Event: SPIE Photomask Technology + EUV Lithography, 2023, Monterey, California, United States

Conference Poster

Abstract

In this paper, we present the development of a new Multi-PNG (mPNG) format for efficient representation of full mask spatial maps (density map, dose map and/or geometric property map). The mPNG consists of multiple independent, interconnected and spatially non-overlapping PNG files, where each PNG file contains the density map for a unique section of the mask area (such that the full mask area is covered through the assembly of all files). Further, the paper will present mPNG file sizes and generation runtimes on full mask data for varying density map grid sizes that are relevant for correcting long range mask process effects in the sub-micron to millimeter range.

(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Rachit Sharma, Ingo Bork, Archana Rajagopalan, Kushlendra Mishra, and Mary Zuo "Efficient representation of full mask density maps in advanced mask data preparation flows", Proc. SPIE 12751, Photomask Technology 2023, 127511C (21 November 2023); https://doi.org/10.1117/12.2687511

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