Preparation and high-frequency properties of high Tc superconducting thin films

Chang-Beom Eom; Theodore H. Geballe

doi:10.1117/12.20890

1 October 1990 Preparation and high-frequency properties of high Tc superconducting thin films

Chang-Beom Eom, Theodore H. Geballe

Proceedings Volume 1287, High Tc Superconductivity: Thin Films and Applications; (1990) https://doi.org/10.1117/12.20890
Event: Advances in Semiconductors and Superconductors: Physics Toward Devices Applications, 1990, San Diego, CA, United States

Abstract

Single target in situ sputter deposition using 9O off-axis geometry has made it possible to study various physical properties of superconducting films of YBaCu3O'x under well controlled conditions. The superconducting DC and high frequency properties, and the normal state properties can all be optimized under conditions which do not necessarily produce the highest Tc's. Surface resistances at 4.2 K and 10 GHz are reproducibly less than 20 iQ. Correlations between the processing parameters, DC properties, microstructures and high frequency properties of these films as they are presently known are summarized.

Citation Download Citation

Chang-Beom Eom and Theodore H. Geballe "Preparation and high-frequency properties of high Tc superconducting thin films", Proc. SPIE 1287, High Tc Superconductivity: Thin Films and Applications, (1 October 1990); https://doi.org/10.1117/12.20890

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