Short-coherence laser based on ASE-induced white noise modulation

Fangxin Li; Jiale Chen; Zhigang Han; Hua Shen; Jiuduo Rui; Xinyang Zhao; Zhixun Wu; Rihong Zhu

doi:10.1117/12.3007555

24 November 2023 Short-coherence laser based on ASE-induced white noise modulation

Fangxin Li, Jiale Chen, Zhigang Han, Hua Shen, Jiuduo Rui, Xinyang Zhao, Zhixun Wu, Rihong Zhu

Proceedings Volume 12935, Fourteenth International Conference on Information Optics and Photonics (CIOP 2023); 1293525 (2023) https://doi.org/10.1117/12.3007555
Event: Fourteenth International Conference on Information Optics and Photonics (CIOP 2023), 2023, Xi’an, China

Abstract

In this paper, based on the amplified spontaneous emission (ASE)-induced limited-band white noise modulation, a short-coherence laser source is developed for the wafer dynamic profilometry. All-fiber Mach-Zehnder optical path is constructed, obtaining the orthogonal-polarized light source with optical path matching for short-coherence dynamic interferometry. The 220-μm coherence length and 28 % side lobe suppression ratio (SLSR) of the modulated laser are realized in Fizeau interferometer. The dynamic profilometry of a 100-mm high-Al-doped glass wafer with 1.5-mm thickness is realized in the common-path interferometer, overcoming the interference fringe crosstalk induced by the front and rear transparent surfaces.

(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Fangxin Li, Jiale Chen, Zhigang Han, Hua Shen, Jiuduo Rui, Xinyang Zhao, Zhixun Wu, and Rihong Zhu "Short-coherence laser based on ASE-induced white noise modulation", Proc. SPIE 12935, Fourteenth International Conference on Information Optics and Photonics (CIOP 2023), 1293525 (24 November 2023); https://doi.org/10.1117/12.3007555

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