Author Affiliations +
Hiroaki Kasai,1 Mayuka Osaki,1 Kazuhisa Hasumi,2 Nobuyuki Mise,2 Maki Tanaka,2 Bensu Tunca Altintas,3 Soon Aik Chew,3 Janusz Bogdanowicz,3 Alain Moussa,3 Mohamed Saib,3 Boyao Zhang,3 Anne-Laure Charley3
1Hitachi, Ltd. (Japan)
2Hitachi High-Tech Corp. (Japan)
3imec (Belgium)