Biomass developer made from plants for lithography processes

Seiji Morita

doi:10.1117/12.3010878

9 April 2024 Biomass developer made from plants for lithography processes

Seiji Morita

Proceedings Volume 12957, Advances in Patterning Materials and Processes XLI; 1295719 (2024) https://doi.org/10.1117/12.3010878
Event: SPIE Advanced Lithography + Patterning, 2024, San Jose, California, United States

Abstract

It is extremely important to reduce CO₂ in the world and to achieve carbon neutral. Various bio-based green materials using biomass made from plants/woods are proposed for achieving carbon neutral. This paper describes biomass developer solvent made from plants for lithography application. CO₂ is markedly reduced, and it is reported reusing of the biomass developer after development process.

Conference Presentation

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Seiji Morita "Biomass developer made from plants for lithography processes", Proc. SPIE 12957, Advances in Patterning Materials and Processes XLI, 1295719 (9 April 2024); https://doi.org/10.1117/12.3010878

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