Research on frequency measurement of the uncooled infrared MEMS resonance sensor

Xia Zhang; Dacheng Zhang

doi:10.1117/12.3026506

20 June 2024 Research on frequency measurement of the uncooled infrared MEMS resonance sensor

Xia Zhang, Dacheng Zhang

Proceedings Volume 12999, Optical Sensing and Detection VIII; 1299933 (2024) https://doi.org/10.1117/12.3026506
Event: SPIE Photonics Europe, 2024, Strasbourg, France

Conference Poster

Abstract

The research on frequency measurement for the designed resonator used to detect infrared radiation by means of tracking the change in resonance frequency of the resonator with temperature attributed to the infrared radiation from targets is presented in this paper. The research provides the basis for the integrated design of the uncooled infrared MEMS resonance structure and its measuring circuits.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Xia Zhang and Dacheng Zhang "Research on frequency measurement of the uncooled infrared MEMS resonance sensor", Proc. SPIE 12999, Optical Sensing and Detection VIII, 1299933 (20 June 2024); https://doi.org/10.1117/12.3026506

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