As part of the investigations, quantum nanolaminates (QNLs) were produced from TiO2, Nb2O5, and ZrO2 using IBS which are presented here. Complex layer systems, such as edge filters or polarizers, are produced using a system control specially adapted for such a large number of layers and the complete automation of the coating process. With these coatings, the focus was also on exploiting the blue-shift caused by quantization. Subsequent investigations are intended to demonstrate their applicability to other areas of optics production. The applications range from high laser damage thresholds to low mechanical losses for the mirrors of gravitational wave detectors or optical clocks.
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