Research progress of high-precision polishing technology on optical diamond material surface

Xiaojing Li; Xiangyang Zhang; Alexander Anokhin; Yunlong Bai; Yan Lei; Xiaodong Bai; Hang Zhu; Kai Jiang; Ping Hu

doi:10.1117/12.3016126

18 March 2024 Research progress of high-precision polishing technology on optical diamond material surface

Xiaojing Li, Xiangyang Zhang, Alexander Anokhin, Yunlong Bai, Yan Lei, Xiaodong Bai, Hang Zhu, Kai Jiang, Ping Hu

Proceedings Volume 13104, Advanced Fiber Laser Conference (AFL2023); 131040A (2024) https://doi.org/10.1117/12.3016126
Event: Advanced Fiber Laser Conference (AFL2023), 2023, Shenzhen, China

Abstract

Central to future optical device developments in diamond is the provision of smooth, low defect density substrate materials. Research progress of optical diamond material surface polishing technology were comprehensively reviewed, the polishing effect and the advantages and disadvantages of the current high-usage polishing methods were introduced, including mechanical polishing, thermal chemical polishing, chemical auxiliary mechanical polishing, laser polishing, plasma treatments etc. The generation of composite polishing technology helps to improve the deficiencies of the original polishing technology and obtain a smaller surface roughness, which is the main research direction at present. Super ultra-precision and high quality on optical diamond surface is the technical development trend in future. A new no contacting method of polishing optical diamond using ion beam was proposed in this paper, which has great application potential because of its advantage of super ultra-precision and no damage.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Xiaojing Li, Xiangyang Zhang, Alexander Anokhin, Yunlong Bai, Yan Lei, Xiaodong Bai, Hang Zhu, Kai Jiang, and Ping Hu "Research progress of high-precision polishing technology on optical diamond material surface", Proc. SPIE 13104, Advanced Fiber Laser Conference (AFL2023), 131040A (18 March 2024); https://doi.org/10.1117/12.3016126

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available