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We developed the Side Looking Confocal Microscope(SLCM) of which illmination axis and sensing axis are tilted from a perpendicular plane of an object. The standard confocal microscope has also an illmination source and a sensor which are situated on the same optical axis from an object. Its enterance angle is zero degrees. So in that case we can''t see 3-dimensional images -which are only bright field image- by means of standard confocal microscope method. SLCM which we developed is able to see 3-dimensional easily like a SEM image because of its angular illumination method.
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