Effect of ion-assisted deposition on optical properties of thin films

Xuefei Tang; Zhengxiu Fan

doi:10.1117/12.22374

1 December 1990 Effect of ion-assisted deposition on optical properties of thin films

Xuefei Tang, Zhengxiu Fan

Proceedings Volume 1323, Optical Thin Films III: New Developments; (1990) https://doi.org/10.1117/12.22374
Event: 34th Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1990, San Diego, CA, United States

Abstract

Effects of ion assisted deposition on the propertes of Ti02, Zr02 and 5102 optical coatings were investigated. Substrates were bombarded with different ions--- oxygen ions , argon ions , and the mixture ions of oxygen-argon during deposition. The refractive indices, optical absorptions and laser-induced damage thresholds (LIDT) measurments of these films are reported.

Citation Download Citation

Xuefei Tang and Zhengxiu Fan "Effect of ion-assisted deposition on optical properties of thin films", Proc. SPIE 1323, Optical Thin Films III: New Developments, (1 December 1990); https://doi.org/10.1117/12.22374

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