Optical aspheric surface profiler using phase shift interferometry

Kenji Sasaki; Akira Ono

doi:10.1117/12.51062

1 January 1991 Optical aspheric surface profiler using phase shift interferometry

Kenji Sasaki, Akira Ono

Proceedings Volume 1332, Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection; (1991) https://doi.org/10.1117/12.51062
Event: 34th Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1990, San Diego, CA, United States

Abstract

The optical aspheric surface profiler was developed. In the profiler a phase shift interferometric technique is used to measure an optical wavefront precisely and modified to be applied for an aspheric wavefront measurement. The profiler makes it easier to measure aspherical surfaces than the profiler using an optical probe or a stylus. The intensity distributions of fringe patterns from a Twyman-Green interferometer are obtained by a linear image sensor while a phase shifter driven by a piezoelectric transducer (PZT) moves. The charge coupled device (CCD) linear image sensor, which has smaller pixels than an area image sensor, detects fine fringe patterns from aspherical surfaces. The fringe data are transmitted into a computer and calculated into the wavefront phase data. In order to analyze the phase data, a non-linear least squares phase fitting method is used to eliminate the effects of the setting error of a tested surface. The profile error from the designed surface, whose parameters are previously saved into the computer, is calculated. The measurement results for the aspherical mirrors were compared to another profiler using a stylus. Finally, the new approach to analyze the phase data is proposed to solve the problem for this profiler and simulated for some data.

Citation Download Citation

Kenji Sasaki and Akira Ono "Optical aspheric surface profiler using phase shift interferometry", Proc. SPIE 1332, Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection, (1 January 1991); https://doi.org/10.1117/12.51062

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