Three materials soft x-ray mirrors: theory and application

Pierre Boher; Louis Hennet; Philippe Houdy

doi:10.1117/12.23315

1 January 1991 Three materials soft x-ray mirrors: theory and application

Pierre Boher, Louis Hennet, Philippe Houdy

Proceedings Volume 1345, Advanced X-Ray/EUV Radiation Sources and Applications; (1991) https://doi.org/10.1117/12.23315
Event: 34th Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1990, San Diego, CA, United States

Abstract

A periodic structure alternating three different materials has been investigated and fabricated using a diode RF-sputtering system. Reflectivity was optimized using the wave propagation method. It is concluded that the amorphous character of the rhodium layers is enhanced in the W/Rh/C structures, and good reflectivities have been obtained at the carbon K-alpha line with trilayer structures including a great number of periods (28 percent of reflectivity for 40 periods stack). Some reduction of the boron interdiffusion is observed in the W/Rh/C structures, which leads to better soft X-ray performances at the boron K-alpha line (19 percent of reflectivity for a 40 periods stack).

Citation Download Citation

Pierre Boher, Louis Hennet, and Philippe Houdy "Three materials soft x-ray mirrors: theory and application", Proc. SPIE 1345, Advanced X-Ray/EUV Radiation Sources and Applications, (1 January 1991); https://doi.org/10.1117/12.23315

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available