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CMUTs are characterised by high electromechanical coupling coefficients and high sensitivity to ultrasonic emission, and the develop deeply in medical ultrasound imaging, non-destructive testing and other Medical fields. However, the safety hazards brought by high voltage and the shortcomings of high power loss limit the scope of its application. Therefore, how to reduce the operating voltage of CMUTs are the key to realizing their application in portable, low-power and long-term on-line inspection. In this manuscript, a low power two-layer CMUTs unit structure are proposed, in which the circular CMUTs cells are on the top part and annular CMUTs structural cells are on the bottom part. When the DC bias voltage is loaded, it forms a bending moment at the pillar, under its influence, the bottom unit produces a displacement. Consequently, the electrostatic deformation of the CMUTs are increased, which makes the ultrasonic transducer have a lower collapse voltage. Ultimately, the effect of reducing the collapse voltage and power consumption without changing the height of the cavity is achieved. In this manuscript, the advantages of double-layer CMUTs are verified by simulation.
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