Discharge technology for excimer lasers of high-average power

Wilhelmus J. Witteman; G. B. Ekelmans; M. Trentelman; Frederik A. van Goor

doi:10.1117/12.25929

1 February 1991 Discharge technology for excimer lasers of high-average power

Wilhelmus J. Witteman, G. B. Ekelmans, M. Trentelman, Frederik A. van Goor

Proceedings Volume 1397, 8th Intl Symp on Gas Flow and Chemical Lasers; (1991) https://doi.org/10.1117/12.25929
Event: Eighth International Symposium on Gas-Flow and Chemical Lasers, 1990, Madrid, Spain

Abstract

The self-sustained discharge of excimers is analyzed. Several excitation schemes that have been successfully applied are compared. For high repetition rate operation not only the discharge stability and its efficiency are important selection criteria but more important is the potential of fast discharge switching with minimum pulse energy. Pulse compression plays a key role in the laser performance. A technology for low energy compression is described.

Citation Download Citation

Wilhelmus J. Witteman, G. B. Ekelmans, M. Trentelman, and Frederik A. van Goor "Discharge technology for excimer lasers of high-average power", Proc. SPIE 1397, 8th Intl Symp on Gas Flow and Chemical Lasers, (1 February 1991); https://doi.org/10.1117/12.25929

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available