Determination of surface quality using moire methods

Eliezer Keren; Kathi Kreske; Yaacov Zac; Amiadav Livnat

doi:10.1117/12.49069

1 April 1991 Determination of surface quality using moire methods

Eliezer Keren, Kathi Kreske, Yaacov Zac, Amiadav Livnat

Proceedings Volume 1442, 7th Mtg in Israel on Optical Engineering; (1991) https://doi.org/10.1117/12.49069
Event: 7th Meeting of Optical Engineering in Israel, 1990, Tel-Aviv, Israel

Abstract

Moire deflectometry is capable of accurately measuring various properties of reflective surfaces. The basic quantity derived from fringe shifts is a map of surface slopes in a given direction. When surface variations are small and rapid, such as on a rough surface, the Imperfections are evident as fringe contrast reduction rather than fringe distortions. The roughness parameters are obtained from the dependence of the contrast on deflectometer sensitivity. The fringe visibility vs. sensitivity curve is a scaled version of the surface autocovariance. The autocovariance function allows quantitative evaluation of average surface heights, RMS, slope RMS, periodicities, and other features which determine the surface quality. The method is demonstrated on a diamond turned hard disk with concentric circular periodic grooves. The surface period and direction is derived from the autocovariance.

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Eliezer Keren, Kathi Kreske, Yaacov Zac, and Amiadav Livnat "Determination of surface quality using moire methods", Proc. SPIE 1442, 7th Mtg in Israel on Optical Engineering, (1 April 1991); https://doi.org/10.1117/12.49069

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KEYWORDS

Moire patterns

Optical engineering

Diamond

Diffraction gratings

Fourier transforms

Fringe analysis

Diffraction

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