Paper
1 August 1991 Diffractive properties of surface-relief microstructures
Dong-Ning Qu, Ronald E. Burge, XiaoCong Yuan
Author Affiliations +
Proceedings Volume 1506, Micro-Optics II; (1991) https://doi.org/10.1117/12.45970
Event: ECO4 (The Hague '91), 1991, The Hague, Netherlands
Abstract
By analyzing the complex values of the electromagnetic fields along surface relief gratings for TE polarization, the diffractive properties of surface relief micro-structures are discussed. The edges and walls of the grooves are found to have significant effects on the surface fields for wavelength-size grooves. The dependence of these effects upon several factors, including the complex refractive index of the material, incident angle and the depth of the grooves, is examined. An oscillating property of the surface field amplitude at the bottom of the grooves against the depth is discovered and discussed. The far field intensity is also found to be closely related to the depth of the grooves.
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Dong-Ning Qu, Ronald E. Burge, and XiaoCong Yuan "Diffractive properties of surface-relief microstructures", Proc. SPIE 1506, Micro-Optics II, (1 August 1991); https://doi.org/10.1117/12.45970
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Cited by 3 scholarly publications.
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KEYWORDS
Aluminum

Diffraction

Refractive index

Gold

Diffraction gratings

Micro optics

Silicon

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