Optical properties of oxide films prepared by ion-beam-sputter deposition

Xuefei Tang; Zhengxiu Fan; ZhiJiang Wang

doi:10.1117/12.47251

1 November 1991 Optical properties of oxide films prepared by ion-beam-sputter deposition

Xuefei Tang, Zhengxiu Fan, ZhiJiang Wang

Proceedings Volume 1519, International Conference on Thin Film Physics and Applications; (1991) https://doi.org/10.1117/12.47251
Event: International Conference on Thin Film Physics and Applications, 1991, Shanghai, China

Abstract

TiO₂ and ZrO₂ coatings were prepared by ion beam sputter deposition. Refractive indices, optical absorptions, and laser-induced damage thresholds of the films were investigated. The optical absorptions of thin films are decreased obviously.

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Xuefei Tang, Zhengxiu Fan, and ZhiJiang Wang "Optical properties of oxide films prepared by ion-beam-sputter deposition", Proc. SPIE 1519, International Conference on Thin Film Physics and Applications, (1 November 1991); https://doi.org/10.1117/12.47251

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