Analysis of the accuracy of aerostatic slideway made from granite

Jinian Li

doi:10.1117/12.48855

1 December 1991 Analysis of the accuracy of aerostatic slideway made from granite

Jinian Li

Proceedings Volume 1533, Optomechanics and Dimensional Stability; (1991) https://doi.org/10.1117/12.48855
Event: San Diego, '91, 1991, San Diego, CA, United States

Abstract

This paper describes a method to analyze overall accuracy of an aerostatic slideway made from granite. Working equations of the aerostatic slideway and precision theory of fine mechanics are used to derive a series of aerostatic slideway calculating equations. It presents the view of multiple. The final measuring results are given by Laser Transduser System 5501A. The horizontal error σ_x = +/- 0.06"(m.s.e.). The vertical error σ_x = +/- 0.09"(m.s.e.). This kind of aerostatic slideway made from granite has been used in photoetching machines.

Citation Download Citation

Jinian Li "Analysis of the accuracy of aerostatic slideway made from granite", Proc. SPIE 1533, Optomechanics and Dimensional Stability, (1 December 1991); https://doi.org/10.1117/12.48855

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