Multilayer coatings on figured optics

Stephen P. Vernon; Daniel Gorman Stearns; Robert S. Rosen; Natale M. Ceglio; David P. Gaines; Michael K. Krumrey; Peter Mueller

doi:10.1117/12.51268

1 January 1992 Multilayer coatings on figured optics

Stephen P. Vernon, Daniel Gorman Stearns, Robert S. Rosen, Natale M. Ceglio, David P. Gaines, Michael K. Krumrey, Peter Mueller

Author Affiliations +

Proceedings Volume 1547, Multilayer Optics for Advanced X-Ray Applications; (1992) https://doi.org/10.1117/12.51268
Event: San Diego, '91, 1991, San Diego, CA, United States

Abstract

Soft x-ray projection lithography (SXPL) requires uniform, high reflectivity multilayer (ML) coatings on figured optical surfaces with lens speeds (f) between 3 and 6 and diameters of 10 to 15 cm. High reflectivity Mo-Si ML coatings for operation near 13 nm were deposited on f 3.4 and f 6 optics 5 and 7.5 cm in diameter using planar dc magnetron sputtering. Measurements of the normal incidence reflectivity (NIR) of 63% at 13 nm uniform over the central 5 cm of the figured surface were obtained. Comparison of the measured values to model calculations of the wavelength dependent reflectivity indicate that the ML period is uniform to better than 0.04 nm over this region.

Citation Download Citation

Stephen P. Vernon, Daniel Gorman Stearns, Robert S. Rosen, Natale M. Ceglio, David P. Gaines, Michael K. Krumrey, and Peter Mueller "Multilayer coatings on figured optics", Proc. SPIE 1547, Multilayer Optics for Advanced X-Ray Applications, (1 January 1992); https://doi.org/10.1117/12.51268

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