Paper
1 January 1992 Properties of the phase images inside the airy disk (Proceedings Only)
Author Affiliations +
Abstract
Phase object pattern analysis has shown the possibility of increasing considerable microscope spatial resolution. Experiment has revealed resolution enhancement of greater than a factor of ten. Some phase object images inside an Airy disk are presented.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Vladimir P. Tychinsky and Alexander V. Tavrov "Properties of the phase images inside the airy disk (Proceedings Only)", Proc. SPIE 1553, Laser Interferometry IV: Computer-Aided Interferometry, (1 January 1992); https://doi.org/10.1117/12.135327
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KEYWORDS
Spatial resolution

Microscopes

Phase measurement

Resolution enhancement technologies

Super resolution

Diffraction

Semiconductors

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