Defect mapping system for optoelectronic materials

K. S .R. K. Rao; K. R. Ramakrishnan; Vikram Kumar

doi:10.1117/12.636962

16 December 1992 Defect mapping system for optoelectronic materials

K. S .R. K. Rao, K. R. Ramakrishnan, Vikram Kumar

Proceedings Volume 1622, Emerging Optoelectronic Technologies; (1992) https://doi.org/10.1117/12.636962
Event: Emerging OE Technologies, Bangalore, India, 1991, Bangalore, India

Abstract

The defect mapping system is built on the principle of Scanning Optical Microscope (SOM). It''s essentially an optical probe with an xY translational stage and a Data Acquisition System (DAS). The SOM can be used in three different modes namely Reflection Transmission and Light Beam Induced Current (LBIC). In this paper the instrumentation and it''s capability as SOM and in LBIC mode has been demonstrated. I

Citation Download Citation

K. S .R. K. Rao, K. R. Ramakrishnan, and Vikram Kumar "Defect mapping system for optoelectronic materials", Proc. SPIE 1622, Emerging Optoelectronic Technologies, (16 December 1992); https://doi.org/10.1117/12.636962

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