Heterodyne common-path interferometer for testing surface roughness

Changyuan Han; Bin Liu; Zhenwu Lu; Quwu Gu

doi:10.1117/12.132149

20 October 1992 Heterodyne common-path interferometer for testing surface roughness

Changyuan Han, Bin Liu, Zhenwu Lu, Quwu Gu

Proceedings Volume 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation; (1992) https://doi.org/10.1117/12.132149
Event: International Symposium on Optical Fabrication, Testing, and Surface Evaluation, 1992, Tokyo, Japan

Abstract

As a modified heterodyne interferometer the heterodyne common path interferometer for measuring surface roughness is described. The interferometer system adopts the isosceles triangle type common path interferometer in which the reference beam and the measurement beam pass through the same optical path so that the mechanical instability, air turbulence, and temperature variations will affect the same value of the optical path for both the beams. The actual height resolution is 1 angstrom, and the lateral resolution is 1 micrometers . This modified interferometer can use general He-Ne laser which needs no frequency stabilizer and general experimental stage without shockproof.

Citation Download Citation

Changyuan Han, Bin Liu, Zhenwu Lu, and Quwu Gu "Heterodyne common-path interferometer for testing surface roughness", Proc. SPIE 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation, (20 October 1992); https://doi.org/10.1117/12.132149

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