Measurement of phase change of light on reflection

Takuma Doi; Kouji Toyoda; Yoshihisa Tanimura

doi:10.1117/12.132151

20 October 1992 Measurement of phase change of light on reflection

Takuma Doi, Kouji Toyoda, Yoshihisa Tanimura

Proceedings Volume 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation; (1992) https://doi.org/10.1117/12.132151
Event: International Symposium on Optical Fabrication, Testing, and Surface Evaluation, 1992, Tokyo, Japan

Abstract

A sample consisting of different metals in the same plane is fabricated, and its surface profile is measured by interferometry. In spite of the flat surface, a virtual step height (max. value equals 33 nm) is measured at the boundary of the two adjacent metals. The measured step height corresponds to the difference in the phase change of reflected light between the two metals. From the results, the effect of the phase change on surface profilometry is estimated.

Citation Download Citation

Takuma Doi, Kouji Toyoda, and Yoshihisa Tanimura "Measurement of phase change of light on reflection", Proc. SPIE 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation, (20 October 1992); https://doi.org/10.1117/12.132151

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