Diamond CVD growth chemistry

Wayne A. Weimer; Curtis E. Johnson

doi:10.1117/12.130776

20 November 1992 Diamond CVD growth chemistry

Wayne A. Weimer, Curtis E. Johnson

Proceedings Volume 1759, Diamond Optics V; (1992) https://doi.org/10.1117/12.130776
Event: San Diego '92, 1992, San Diego, CA, United States

Abstract

Results accumulated in our laboratory and elsewhere suggest that a common reaction mechanism is operative in all of the diamond CVD techniques using a hydrocarbon diluted in hydrogen as the reactor gas feed composition. Detailed investigations into the chemistry involved in diamond CVD have been conducted using microwave plasma assisted CVD and DC arc jet plasma CVD reactors. Results from optical spectroscopic, mass spectrometric, electrostatic probe and kinetic model calculations support a applicability of a mechanism originally developed to describe the oxidation of methane in flames to diamond CVD. The evidence supporting this applicability along with relevant implications for future directions in diamond research will be discussed.

Citation Download Citation

Wayne A. Weimer and Curtis E. Johnson "Diamond CVD growth chemistry", Proc. SPIE 1759, Diamond Optics V, (20 November 1992); https://doi.org/10.1117/12.130776

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