Properties of optically smooth diamond thin films produced by ECR-PACVD

Shu Jin; Marco Fanciulli; Donald Y. Jong; Yi-Wu He; Theodore D. Moustakas

doi:10.1117/12.130766

20 November 1992 Properties of optically smooth diamond thin films produced by ECR-PACVD

Shu Jin, Marco Fanciulli, Donald Y. Jong, Yi-Wu He, Theodore D. Moustakas

Proceedings Volume 1759, Diamond Optics V; (1992) https://doi.org/10.1117/12.130766
Event: San Diego '92, 1992, San Diego, CA, United States

Abstract

Optically smooth diamond films were deposited on Al and Si substrates by the ECR-PACVD method. The films on Al were grown on relatively low temperatures and pressures from CH₃OH/H₂O and were found to have highly defective nanocrystalline structure. The films on c-Si were grown at higher temperatures and pressures from CH₄/H₂/O₂ and were found to consist of highly oriented (100) faceted crystals. The optical constants of the diamond films on c-Si are similar to those of natural diamond.

Citation Download Citation

Shu Jin, Marco Fanciulli, Donald Y. Jong, Yi-Wu He, and Theodore D. Moustakas "Properties of optically smooth diamond thin films produced by ECR-PACVD", Proc. SPIE 1759, Diamond Optics V, (20 November 1992); https://doi.org/10.1117/12.130766

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