Automatic field emission tip conditioning system for the subangstrom resolution STEM

Shengyang Ruan; Oscar H. Kapp

doi:10.1117/12.130964

1 August 1992 Automatic field emission tip conditioning system for the subangstrom resolution STEM

Shengyang Ruan, Oscar H. Kapp

Proceedings Volume 1778, Imaging Technologies and Applications; (1992) https://doi.org/10.1117/12.130964
Event: Optical Engineering Midwest 1992, 1992, Chicago, IL, United States

Abstract

An automatic computer-controlled system has been completed for conditioning cold field- emission tips in a new high resolution sextupole-corrected scanning transmission electron microscope (STEM). Using this system, a tip may be conditioned optimally and subsequently operated under careful control, extending its lifetime.

Citation Download Citation

Shengyang Ruan and Oscar H. Kapp "Automatic field emission tip conditioning system for the subangstrom resolution STEM", Proc. SPIE 1778, Imaging Technologies and Applications, (1 August 1992); https://doi.org/10.1117/12.130964

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