Electric field structure optimization in IC solid state spatial light modulator

Nickolay B. Kuleshov; Victor A. Tarasov; Igor V. Tokarev; Sergey S. Sarkisov

doi:10.1117/12.130996

1 August 1992 Electric field structure optimization in IC solid state spatial light modulator

Nickolay B. Kuleshov, Victor A. Tarasov, Igor V. Tokarev, Sergey S. Sarkisov

Proceedings Volume 1783, International Conference of Microelectronics: Microelectronics '92; (1992) https://doi.org/10.1117/12.130996
Event: International Conference on Microelectronics, 1992, Warsaw, Poland

Abstract

The results of the theoretical analysis of electric field structure in a spatial light modulator with viscoelastic deformable layers controlled by addressing a CMOS active matrix are presented.

Citation Download Citation

Nickolay B. Kuleshov, Victor A. Tarasov, Igor V. Tokarev, and Sergey S. Sarkisov "Electric field structure optimization in IC solid state spatial light modulator", Proc. SPIE 1783, International Conference of Microelectronics: Microelectronics '92, (1 August 1992); https://doi.org/10.1117/12.130996

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