Micromachined silicon accelerometer with fiber optic interrogation

Deepak G. Uttamchandani; Dawei Liang; Brian Culshaw

doi:10.1117/12.141227

2 March 1993 Micromachined silicon accelerometer with fiber optic interrogation

Deepak G. Uttamchandani, Dawei Liang, Brian Culshaw

Proceedings Volume 1793, Integrated Optics and Microstructures; (1993) https://doi.org/10.1117/12.141227
Event: Fibers '92, 1992, Boston, MA, United States

Abstract

Silicon micromechanics technology has formed the basis of a range of compact and reliable sensors, measuring variables such as pressure, force and acceleration. Most micromechanical sensors require some form of electrical read-out. Therefore, these sensors are classified as electrically active. Electrically passive sensors also have many applications, and the best examples of such sensors are those based on fiber optic technology. In this paper, we describe a sensor which combines the advantages of both silicon micromechanics and fiber optics. Specifically, an accelerometer has been fabricated, and initial results on the performance of this device are presented.

Citation Download Citation

Deepak G. Uttamchandani, Dawei Liang, and Brian Culshaw "Micromachined silicon accelerometer with fiber optic interrogation", Proc. SPIE 1793, Integrated Optics and Microstructures, (2 March 1993); https://doi.org/10.1117/12.141227

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