Efficient line narrowing and wavelength stabilization of excimer lasers

Malcolm C. Gower; C. Williams; Paul Apte; Phil T. Rumsby

doi:10.1117/12.143048

19 April 1993 Efficient line narrowing and wavelength stabilization of excimer lasers

Malcolm C. Gower, C. Williams, Paul Apte, Phil T. Rumsby

Proceedings Volume 1835, Excimer Lasers: Applications, Beam Delivery Systems, and Laser Design; (1993) https://doi.org/10.1117/12.143048
Event: Applications in Optical Science and Engineering, 1992, Boston, MA, United States

Abstract

Efficient line-narrowing at 308, 248 and 193 nm is reported using intracavity etalons in commercial excimer lasers. With a single etalon the linewidth is reduced by a factor of X10 - 20 at each wavelength. The line-narrowing efficiency can then be as high as 60 - 75% of the broadband output and single pulse energies in the range of 200 - 300 mJ can be produced within a linewidth of approximately 20 pm. With two intracavity etalons the linewidth is restricted a further factor of approximately X10 with line-narrowing efficiencies of 15 - 25%. At all wavelengths single pulse energies of 60 - 100 mJ could readily be produced within 2 - 3 pm. Using an laser spectrometer with a 1-D diode array readout and PC interface, the wavelength of such a line-narrowed KrF laser has been actively locked to the stable line output from a HeNe laser.

Citation Download Citation

Malcolm C. Gower, C. Williams, Paul Apte, and Phil T. Rumsby "Efficient line narrowing and wavelength stabilization of excimer lasers", Proc. SPIE 1835, Excimer Lasers: Applications, Beam Delivery Systems, and Laser Design, (19 April 1993); https://doi.org/10.1117/12.143048

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