PROCEEDINGS VOLUME 1927
SPIE'S 1993 SYMPOSIUM ON MICROLITHOGRAPHY | 28-5 FEBRUARY 1993
Optical/Laser Microlithography
Editor(s): John D. Cuthbert
Editor Affiliations +
SPIE'S 1993 SYMPOSIUM ON MICROLITHOGRAPHY
28-5 February 1993
San Jose, CA, United States
Phase-Shift Methods
Kurt G. Ronse, Rik M. Jonckheere, Casper A. H. Juffermans, Luc Van den Hove
Proceedings Volume Optical/Laser Microlithography, (1993) https://doi.org/10.1117/12.150416
Minoru Sugawara, Hiroichi Kawahira, Akihiro Ogura, Satoru Nozawa
Proceedings Volume Optical/Laser Microlithography, (1993) https://doi.org/10.1117/12.150426
Christophe Pierrat, Alfred K. K. Wong, Sheila Vaidya, Matthew Vernon
Proceedings Volume Optical/Laser Microlithography, (1993) https://doi.org/10.1117/12.150446
Proceedings Volume Optical/Laser Microlithography, (1993) https://doi.org/10.1117/12.150465
Phase-Shift and Oblique-Illumination Methods
Proceedings Volume Optical/Laser Microlithography, (1993) https://doi.org/10.1117/12.150474
David M. Newmark, Joseph G. Garofalo, Sheila Vaidya
Proceedings Volume Optical/Laser Microlithography, (1993) https://doi.org/10.1117/12.150484
Emiko Sugiura, Hisashi Watanabe, Takashi Saito, Tadashi Imoriya, Yoshihiro Todokoro, Morio Inoue
Proceedings Volume Optical/Laser Microlithography, (1993) https://doi.org/10.1117/12.150490
Proceedings Volume Optical/Laser Microlithography, (1993) https://doi.org/10.1117/12.150417
Oblique-Illumination Methods
Proceedings Volume Optical/Laser Microlithography, (1993) https://doi.org/10.1117/12.150418
Paul Frank Luehrmann Jr., Peter van Oorschot, Hans Jasper, Sunny Stalnaker, Steve K. Brainerd, J. Brett Rolfson, Linard Karklin
Proceedings Volume Optical/Laser Microlithography, (1993) https://doi.org/10.1117/12.150419
William N. Partlo, Paul Jay Tompkins, Paul G. Dewa, Paul F. Michaloski
Proceedings Volume Optical/Laser Microlithography, (1993) https://doi.org/10.1117/12.150420
Anthony Yen, William N. Partlo, Shane R. Palmer, Maureen A. Hanratty, Michael C. Tipton
Proceedings Volume Optical/Laser Microlithography, (1993) https://doi.org/10.1117/12.150421
Pei-yang Yan, Qi-De Qian, Joseph C. Langston
Proceedings Volume Optical/Laser Microlithography, (1993) https://doi.org/10.1117/12.150422
Phase-Shift, Oblique-Illumination, and Pupil Filter Methods
Timothy A. Brunner, Pia N. Sanda, M. Wordeman, Tom Lii
Proceedings Volume Optical/Laser Microlithography, (1993) https://doi.org/10.1117/12.150423
Rainer Pforr, Rik M. Jonckheere, Wolfgang Henke, Kurt G. Ronse, Patrick Jaenen, Ki-Ho Baik, Luc Van den Hove
Proceedings Volume Optical/Laser Microlithography, (1993) https://doi.org/10.1117/12.150424
Yong-Ho Oh, Hyung Joun Yoo, Byung-Sun Park, Zion Cha, Hyo-Joong Kim, Young Jin Jeon
Proceedings Volume Optical/Laser Microlithography, (1993) https://doi.org/10.1117/12.150425
Hoyoung Kang, Chul Hong Kim, Woo-Sung Han, Young-Bum Koh, Moon-Yong Lee
Proceedings Volume Optical/Laser Microlithography, (1993) https://doi.org/10.1117/12.150427
Haixing Zou, Qihua Yan, Yu Yan
Proceedings Volume Optical/Laser Microlithography, (1993) https://doi.org/10.1117/12.150428
I-Line and DUV Lithographies I
Masahiko Kowaka, Yukio Kobayashi, Osamu Wakabayashi, Noritoshi Ito, Junichi Fujimoto, Takanobu Ishihara, Hiroaki Nakarai, Hakaru Mizoguchi, Yoshiho Amada, et al.
Proceedings Volume Optical/Laser Microlithography, (1993) https://doi.org/10.1117/12.150429
Uday K. Sengupta, Toshihiko Ishihara, Richard L. Sandstrom
Proceedings Volume Optical/Laser Microlithography, (1993) https://doi.org/10.1117/12.150430
Tohru Ogawa, Mitsumori Kimura, Tetsuo Gocho, Yoichi Tomo, Toshiro Tsumori
Proceedings Volume Optical/Laser Microlithography, (1993) https://doi.org/10.1117/12.150431
Han J. Dijkstra, Casper A. H. Juffermans
Proceedings Volume Optical/Laser Microlithography, (1993) https://doi.org/10.1117/12.150432
Donald O. Arugu, Kent G. Green, Peter D. Nunan, Marcel Terbeek, Sue E. Crank, Lam Ta, Elliott Sean Capsuto, Satyendra S. Sethi
Proceedings Volume Optical/Laser Microlithography, (1993) https://doi.org/10.1117/12.150433
Barton A. Katz, Leif R. Sloan, James Foster, Richard Rogoff, Ronfu Chu, Daniel Hao-Tien Lee
Proceedings Volume Optical/Laser Microlithography, (1993) https://doi.org/10.1117/12.150434
I-Line and DUV Lithographies II
Koji Yamanaka, Haruo Iwasaki, Hiroshi Nozue, Kunihiko Kasama
Proceedings Volume Optical/Laser Microlithography, (1993) https://doi.org/10.1117/12.150435
William N. Partlo, Setha G. Olson, Christopher Sparkes, James E. Connors
Proceedings Volume Optical/Laser Microlithography, (1993) https://doi.org/10.1117/12.150436
Vasanti A. Deshpande, Karey L. Holland, Alex Hong
Proceedings Volume Optical/Laser Microlithography, (1993) https://doi.org/10.1117/12.150437
Simulations and Experiments I
John Joseph Helmsen, Andrew R. Neureuther
Proceedings Volume Optical/Laser Microlithography, (1993) https://doi.org/10.1117/12.150438
Proceedings Volume Optical/Laser Microlithography, (1993) https://doi.org/10.1117/12.150439
Masaya Komatsu
Proceedings Volume Optical/Laser Microlithography, (1993) https://doi.org/10.1117/12.150440
Michael K. Templeton, Eytan Barouch, Uwe Hollerbach, Steven A. Orszag
Proceedings Volume Optical/Laser Microlithography, (1993) https://doi.org/10.1117/12.150441
Kevin D. Lucas, Andrzej J. Strojwas, K. K. Low, Chi-Min Yuan
Proceedings Volume Optical/Laser Microlithography, (1993) https://doi.org/10.1117/12.150442
Simulations and Experiments II
Michael S. Yeung, Derek Lee, Robert S. Lee, Andrew R. Neureuther
Proceedings Volume Optical/Laser Microlithography, (1993) https://doi.org/10.1117/12.150443
Roderick R. Kunz, Mark A. Hartney, Richard W. Otten Jr., Eytan Barouch, Uwe Hollerbach
Proceedings Volume Optical/Laser Microlithography, (1993) https://doi.org/10.1117/12.150444
Yong Liu, Avideh Zakhor
Proceedings Volume Optical/Laser Microlithography, (1993) https://doi.org/10.1117/12.150445
James E. Connors, Todd Kos, Robert C. Pack, Bruce W. Smith
Proceedings Volume Optical/Laser Microlithography, (1993) https://doi.org/10.1117/12.150447
Phase-Contrast Lithography and Overlay
Proceedings Volume Optical/Laser Microlithography, (1993) https://doi.org/10.1117/12.150448
Proceedings Volume Optical/Laser Microlithography, (1993) https://doi.org/10.1117/12.150449
Roger C. Sumner, David S. Holbrook
Proceedings Volume Optical/Laser Microlithography, (1993) https://doi.org/10.1117/12.150450
Proceedings Volume Optical/Laser Microlithography, (1993) https://doi.org/10.1117/12.150451
Rina Sharma, Gururaj A. Bhat, Alok K. Kanjilal, Ram Narain, M. S. Rashmi, Vijay Trimbak Chitnis, Yoshiyuki Uchida
Proceedings Volume Optical/Laser Microlithography, (1993) https://doi.org/10.1117/12.150452
Advanced Optical Systems
Michio Kohno, Nobuhiro Kodachi, Kazumi Yajima, Seiya Miura
Proceedings Volume Optical/Laser Microlithography, (1993) https://doi.org/10.1117/12.150453
Stefan Wittekoek, Martin A. van den Brink, G. J Poppelaars, Marijan E. Reuhman-Huisken, A. Grassman, U. Boettinger
Proceedings Volume Optical/Laser Microlithography, (1993) https://doi.org/10.1117/12.150454
Mark William Barrick, Doug Bommarito, Karey L. Holland, Katherine C. Norris, Bob Patterson, Yumiko Takamori, Joseph C. Vigil, Timothy J. Wiltshire
Proceedings Volume Optical/Laser Microlithography, (1993) https://doi.org/10.1117/12.150455
Andrew V. Hill, James E. Webb, Anthony R. Phillips, James E. Connors
Proceedings Volume Optical/Laser Microlithography, (1993) https://doi.org/10.1117/12.150456
Poster Session/Reception
David S. O'Grady, Stan P. Bajuk, Edward T. Smith
Proceedings Volume Optical/Laser Microlithography, (1993) https://doi.org/10.1117/12.150457
Joachim Schneider, Fred Becker, Brian Raynor, Birgit Weismann
Proceedings Volume Optical/Laser Microlithography, (1993) https://doi.org/10.1117/12.150458
Hiroshi Ohtsuka, Kazuyuki Kuwahara, Toshio Onodera
Proceedings Volume Optical/Laser Microlithography, (1993) https://doi.org/10.1117/12.150459
Mircea V. Dusa, Linard Karklin, Mark Goldmann, William M. Gouin, George P. Mirth
Proceedings Volume Optical/Laser Microlithography, (1993) https://doi.org/10.1117/12.150460
Lothar Bauch, Joachim J. Bauer, Monika Boettcher, Ulrich Haak, Wolfgang W. Hoeppner, Georg G. Mehliss
Proceedings Volume Optical/Laser Microlithography, (1993) https://doi.org/10.1117/12.150461
Junji Miyazaki, Atsumi Yamaguchi, Keiji Fujiwara, Nobuyuki Yoshioka, Hiroaki Morimoto, Katsuhiro Tsukamoto
Proceedings Volume Optical/Laser Microlithography, (1993) https://doi.org/10.1117/12.150462
Eytan Barouch, Daniel C. Cole, Uwe Hollerbach, Steven A. Orszag
Proceedings Volume Optical/Laser Microlithography, (1993) https://doi.org/10.1117/12.150463
Long Que, Guoliang Sun, Boru Feng
Proceedings Volume Optical/Laser Microlithography, (1993) https://doi.org/10.1117/12.150464
Satoshi Aoyama, Haruhiko Kusunose, Minoru Hanazaki, Nobuyuki Yoshioka, Yaichiro Watakabe, Atsushi Hayashi, Akihiko Isao, Yasuo Tokoro
Proceedings Volume Optical/Laser Microlithography, (1993) https://doi.org/10.1117/12.150466
Charles H. Fields, William G. Oldham, Richard J. Bojko
Proceedings Volume Optical/Laser Microlithography, (1993) https://doi.org/10.1117/12.150467
Rainer Paetzel, Hermann Buecher, Ulrich Rebhan
Proceedings Volume Optical/Laser Microlithography, (1993) https://doi.org/10.1117/12.150468
Igor V. Fomenkov, Richard L. Sandstrom
Proceedings Volume Optical/Laser Microlithography, (1993) https://doi.org/10.1117/12.150469
Alexander N. Novoselov, Victor G. Nikiforov, Alexander F. Silnitsky, Boris F. Trinchuk
Proceedings Volume Optical/Laser Microlithography, (1993) https://doi.org/10.1117/12.150470
Christopher F. Lyons, Nicholas K. Eib, Marina V. Plat, Gary T. Spinillo, Kevin M. Welsh
Proceedings Volume Optical/Laser Microlithography, (1993) https://doi.org/10.1117/12.150471
Daniel Hao-Tien Lee, Chih-Yung Lin, Gwo-Yuh Shiau
Proceedings Volume Optical/Laser Microlithography, (1993) https://doi.org/10.1117/12.150472
Francoise Vinet, Thierry Mourier, Fabienne Baudru, Charles Le Cornec, Michel Lerme, Bernard Guillaumot, Michel Laurens
Proceedings Volume Optical/Laser Microlithography, (1993) https://doi.org/10.1117/12.150473
James R. Przybyla, Tim Emery, Hussein Mukaled
Proceedings Volume Optical/Laser Microlithography, (1993) https://doi.org/10.1117/12.150475
I-Line and DUV Lithographies II
Gary E. Flores, Warren W. Flack
Proceedings Volume Optical/Laser Microlithography, (1993) https://doi.org/10.1117/12.150476
Poster Session/Reception
Giovanni Rivera, Paolo Canestrari
Proceedings Volume Optical/Laser Microlithography, (1993) https://doi.org/10.1117/12.150477
John G. Maltabes, Mark C. Hakey, Alan L. Levine
Proceedings Volume Optical/Laser Microlithography, (1993) https://doi.org/10.1117/12.150478
Patricia F. Mahoney, Chris A. Mack
Proceedings Volume Optical/Laser Microlithography, (1993) https://doi.org/10.1117/12.150479
Proceedings Volume Optical/Laser Microlithography, (1993) https://doi.org/10.1117/12.150480
Bruce W. Smith, Donis G. Flagello, Joseph R. Summa, Lynn F. Fuller
Proceedings Volume Optical/Laser Microlithography, (1993) https://doi.org/10.1117/12.150481
Shay Kaplan, Linard Karklin
Proceedings Volume Optical/Laser Microlithography, (1993) https://doi.org/10.1117/12.150482
Richard D. Holscher, Bruce W. Smith, Steve K. Brainerd
Proceedings Volume Optical/Laser Microlithography, (1993) https://doi.org/10.1117/12.150483
Proceedings Volume Optical/Laser Microlithography, (1993) https://doi.org/10.1117/12.150485
Dohoon Kim, Boo-Yeon Choi, Ki Ro Chung, Chi-Hoon Jun, Won-Ick Jang, Youn Tae Kim, Jong-Hyun Lee, Heung Ok Park
Proceedings Volume Optical/Laser Microlithography, (1993) https://doi.org/10.1117/12.150486
Gary E. Flores, Warren W. Flack, Lynn Dwyer
Proceedings Volume Optical/Laser Microlithography, (1993) https://doi.org/10.1117/12.150487
Bruce W. Smith, Malcolm C. Gower, Mark Westcott, Lynn F. Fuller
Proceedings Volume Optical/Laser Microlithography, (1993) https://doi.org/10.1117/12.150488
Haixing Zou, Yudong Zhang
Proceedings Volume Optical/Laser Microlithography, (1993) https://doi.org/10.1117/12.150489
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