Production and characterization of ion-beam-sputtered multilayers

Joseph Pedulla; Richard D. Deslattes Jr.

doi:10.1117/12.167240

1 February 1994 Production and characterization of ion-beam-sputtered multilayers

Joseph Pedulla, Richard D. Deslattes Jr.

Proceedings Volume 2011, Multilayer and Grazing Incidence X-Ray/EUV Optics II; (1994) https://doi.org/10.1117/12.167240
Event: SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation, 1993, San Diego, CA, United States

Abstract

We report on the application of low pressure ion beam sputtering combined with simultaneous (neutralized) ion beam polishing to the production of multilayer structures for x-ray optics. Initial examination of these structures by high resolution diffractometry at 0.154 nm indicates that the structures exhibit a high degree of structural perfection.

Citation Download Citation

Joseph Pedulla and Richard D. Deslattes Jr. "Production and characterization of ion-beam-sputtered multilayers", Proc. SPIE 2011, Multilayer and Grazing Incidence X-Ray/EUV Optics II, (1 February 1994); https://doi.org/10.1117/12.167240

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