Laser heterodyne profilometer with several improved techniques

Xiang Li; Jia Wang; Yang Zhao; Mang Cao; Dacheng Li

doi:10.1117/12.162104

22 October 1993 Laser heterodyne profilometer with several improved techniques

Xiang Li, Jia Wang, Yang Zhao, Mang Cao, Dacheng Li

Proceedings Volume 2066, Industrial Optical Sensing and Metrology: Applications and Integration; (1993) https://doi.org/10.1117/12.162104
Event: Optical Tools for Manufacturing and Advanced Automation, 1993, Boston, MA, United States

Abstract

An optical heterodyne system for the measurement of profile and roughness has been developed. Several improved techniques are employed. The optical system was designed with entire common path. The effect of sample vibration and the thermal drift could be eliminated. A modified objective was used to perform respectively the measurement beam and the reference beam. The detected signals were processed with phase comparison technique to give a high accuracy. The optical system can be developed to an accessory of the Zeeman laser interferometers.

Citation Download Citation

Xiang Li, Jia Wang, Yang Zhao, Mang Cao, and Dacheng Li "Laser heterodyne profilometer with several improved techniques", Proc. SPIE 2066, Industrial Optical Sensing and Metrology: Applications and Integration, (22 October 1993); https://doi.org/10.1117/12.162104

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