Study of a new measuring method by metering grating

Hong-Lin Yu

doi:10.1117/12.156397

22 September 1993 Study of a new measuring method by metering grating

Hong-Lin Yu

Proceedings Volume 2101, Measurement Technology and Intelligent Instruments; (1993) https://doi.org/10.1117/12.156397
Event: Measurement Technology and Intelligent Instruments, 1993, Wuhan, China

Abstract

A new measuring method by metering grating is introduced in this paper that is, a special solid -atate image sensor (self-scanned photodiode array) is used to replace the motionless grating in the new measuring system which also consists of a movable grating and high resolution can be achieved by acquiring grating information directly. The measuring accuracy is not influenced by the quality of Moire signal, and the measuring system can reach a high resolution of more than 1000 and has the advantage of high resistance to interference.

Citation Download Citation

Hong-Lin Yu "Study of a new measuring method by metering grating", Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); https://doi.org/10.1117/12.156397

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