Paper
22 September 1993 Synthetic measuring deviation of the cantilever coordinate measuring machine
David Shu, Ya-Xun Zhou
Author Affiliations +
Proceedings Volume 2101, Measurement Technology and Intelligent Instruments; (1993) https://doi.org/10.1117/12.156411
Event: Measurement Technology and Intelligent Instruments, 1993, Wuhan, China
Abstract
A high precision plate is placed in a quadrant ( I II III IV quadrants) with two posit ions, and with direction cosines of the machine coordinate axes X,Y,Z. When inpute X, Y ; YZ; or Z, X values, then there are output Z ; X ; or Y , Therefore,the difference between the output and the third axis with own component error will be the synthetical measuring deviation. At present we create a mathematical model to describe the interaction of the error components and the synthetical measuring deviation. According to this model, we can obtain the error components from the synthetic deviation.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
David Shu and Ya-Xun Zhou "Synthetic measuring deviation of the cantilever coordinate measuring machine", Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); https://doi.org/10.1117/12.156411
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KEYWORDS
Mathematical modeling

Calibration

Data processing

Ions

3D metrology

Astatine

Error analysis

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