AlGaAs/GaAs micromachining for monolithic integration of optical and mechanical components

Yuji Uenishi; Hidenao Tanaka; Hiro Ukita

doi:10.1117/12.190933

21 October 1994 AlGaAs/GaAs micromachining for monolithic integration of optical and mechanical components

Yuji Uenishi, Hidenao Tanaka, Hiro Ukita

Proceedings Volume 2291, Integrated Optics and Microstructures II; (1994) https://doi.org/10.1117/12.190933
Event: SPIE's 1994 International Symposium on Optics, Imaging, and Instrumentation, 1994, San Diego, CA, United States

Abstract

GaAs-based micromachining is a very attractive technique for integrating mechanical structures and active optical devices such as laser diodes and photodiodes. For the monolithic integration of micromechanical parts onto laser diode wafers, the compatibility to a laser diode fabrication process is essential. Our micromachining technique features three major processes of epitaxial growth (MOVPE) for both structural and sacrificial layers, reactive dry-etching by chlorine for high-aspect, three-dimensional structures, and selective wet-etching by peroxide/ammonium hydroxide solution to release the moving parts. These processes are compatible with laser fabrication, so a cantilever beam structure can be fabricated at the same time as a laser diode structure. Furthermore, a single-crystal epitaxial layer has little residual stress, so precise microstructures can be obtained without significant deformation. We fabricated a microbeam resonator sensor composed of two laser diodes, a photodiode, and a micro- cantilever beam with an area of 400 micrometers X 700 micrometers . the cantilever beam is excited by an intensity modulated laser beam from an integrated excitation laser diode, and the vibration signal is detected by a couple cavity laser diode and photodiode.

Citation Download Citation

Yuji Uenishi, Hidenao Tanaka, and Hiro Ukita "AlGaAs/GaAs micromachining for monolithic integration of optical and mechanical components", Proc. SPIE 2291, Integrated Optics and Microstructures II, (21 October 1994); https://doi.org/10.1117/12.190933

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available