Mass-transport fabrication of large-numerical-aperture micro-optics

Zong-Long Liau

doi:10.1117/12.209033

12 May 1995 Mass-transport fabrication of large-numerical-aperture micro-optics

Zong-Long Liau

Proceedings Volume 2383, Micro-Optics/Micromechanics and Laser Scanning and Shaping; (1995) https://doi.org/10.1117/12.209033
Event: Photonics West '95, 1995, San Jose, CA, United States

Abstract

A promising approach for efficient microlenses and compact diode laser systems is reviewed. Development of one-step etching of the lens preform and effective wafer protection in mass transport has led to a considerably simplified process and increased reproducibility. Anamorphic microlenses have been fabricated and demonstrate capability for simple compact optics for tapered high-power diode lasers, with coupling of 347 mW into a single-mode fiber. GaAs microlenses have been developed as a first step toward monolithic laser/lens integration. Simple hybrid integration has been demonstrated with a direct mounting of microlenses on packaged lasers.

Citation Download Citation

Zong-Long Liau "Mass-transport fabrication of large-numerical-aperture micro-optics", Proc. SPIE 2383, Micro-Optics/Micromechanics and Laser Scanning and Shaping, (12 May 1995); https://doi.org/10.1117/12.209033

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