Nanocrystalline diamond films: new material for IR optics

Vitali I. Konov; E. D. Obraztsova; Sergej M. Pimenov; Victor G. Ralchenko; Andrey A. Smolin; A. V. Khomich; Vladimir I. Polyakov; A. I. Rukovishnikov; Polievet I. Perov; E. N. Loubnin

doi:10.1117/12.213708

14 July 1995 Nanocrystalline diamond films: new material for IR optics

Vitali I. Konov, E. D. Obraztsova, Sergej M. Pimenov, Victor G. Ralchenko, Andrey A. Smolin, A. V. Khomich, Vladimir I. Polyakov, A. I. Rukovishnikov, Polievet I. Perov, E. N. Loubnin

Author Affiliations +

Proceedings Volume 2428, Laser-Induced Damage in Optical Materials: 1994; (1995) https://doi.org/10.1117/12.213708
Event: Laser-Induced Damage in Optical Materials: 1994, 1994, Boulder, CO, United States

Abstract

Thin nanocrystalline diamond films promising for IR optical applications were grown on Si substrates from methane-hydrogen gas mixture in a DC arc plasma CVD reactor. Three stages for the synthesis of the highly smooth noncrystalline diamond films are important: (i) substrate pretreatment with ultrafine diamond powder, (ii) excimer laser irradiation of seeded substrates, and (iii) two-step deposition process. A correlation between optical properties of the films and growth conditions has been established by means of Raman spectroscopy, spectroscopic ellipsometry and optical transmission spectroscopy techniques. Surface roughness, which was R_a equals 8 - 40 nm for the 1 micrometers thick films, significantly decreased the transmission in the visible because of light scattering, but it had a negligible effect in the IR range. The films are transparent in the IR and have optical constants n equals 2.34-2.36 and k equals 0.005- 0.03. The hydrogen incorporation in the films in amounts up to 1.5% have been deduced from intensity of C-H absorption band around 2900 cm(superscript -1.

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Vitali I. Konov, E. D. Obraztsova, Sergej M. Pimenov, Victor G. Ralchenko, Andrey A. Smolin, A. V. Khomich, Vladimir I. Polyakov, A. I. Rukovishnikov, Polievet I. Perov, and E. N. Loubnin "Nanocrystalline diamond films: new material for IR optics", Proc. SPIE 2428, Laser-Induced Damage in Optical Materials: 1994, (14 July 1995); https://doi.org/10.1117/12.213708

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