Laser-induced etching and deposition of tungsten in tungstenhexafluoride-hydrogen atmosphere

K. Piglmayer; Zsolt Toth; Zoltan Kantor

doi:10.1117/12.203636

1 March 1995 Laser-induced etching and deposition of tungsten in tungstenhexafluoride-hydrogen atmosphere

K. Piglmayer, Zsolt Toth, Zoltan Kantor

Proceedings Volume 2498, Laser Methods of Surface Treatment and Modification: ALT '94 International Conference; (1995) https://doi.org/10.1117/12.203636
Event: Laser Methods of Surface Treatment and Modification: ALT '94 International Conference, 1994, Konstanz, Germany

Abstract

Combined thermally induced etching and deposition of W in a mixture of WF₆ and H₂ is investigated by local laser-induced patterning of thin tungsten layers on quartz. The process divides into areas of pure etching and deposition, depending on the partial pressures of the gases.

Citation Download Citation

K. Piglmayer, Zsolt Toth, and Zoltan Kantor "Laser-induced etching and deposition of tungsten in tungstenhexafluoride-hydrogen atmosphere", Proc. SPIE 2498, Laser Methods of Surface Treatment and Modification: ALT '94 International Conference, (1 March 1995); https://doi.org/10.1117/12.203636

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