Tomographic scanning microscope for 1 to 4-KeV xrays

Ian McNulty; Yipeng Feng; Waleed S. Haddad; James E. Trebes

doi:10.1117/12.221676

25 September 1995 Tomographic scanning microscope for 1 to 4-KeV xrays

Ian McNulty, Yipeng Feng, Waleed S. Haddad, James E. Trebes

Author Affiliations +

Proceedings Volume 2516, X-Ray Microbeam Technology and Applications; (1995) https://doi.org/10.1117/12.221676
Event: SPIE's 1995 International Symposium on Optical Science, Engineering, and Instrumentation, 1995, San Diego, CA, United States

Abstract

X-ray microtomography enables three-dimensional imaging at sub-micron resolution with elemental and chemical state contrast. The 1 - 4 KeV energy region is promising for microtomography of biological, microelectronics, and materials sciences specimens. To capitalize on this potential, we are constructing a tomographic scanning x-ray microscope for 1 - 4 KeV x rays on a spherical grating monochromator beamline at the advanced photon source. The microscope, which uses zone plate optics, has an anticipated spatial resolution of 100 nm and an energy resolution of better than 1 eV.

Citation Download Citation

Ian McNulty, Yipeng Feng, Waleed S. Haddad, and James E. Trebes "Tomographic scanning microscope for 1 to 4-KeV xrays", Proc. SPIE 2516, X-Ray Microbeam Technology and Applications, (25 September 1995); https://doi.org/10.1117/12.221676

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