Saturated electron lens design using a second-order finite element method

John Hodkinson; Khadija Tahir

doi:10.1117/12.221587

25 September 1995 Saturated electron lens design using a second-order finite element method

John Hodkinson, Khadija Tahir

Proceedings Volume 2522, Electron-Beam Sources and Charged-Particle Optics; (1995) https://doi.org/10.1117/12.221587
Event: SPIE's 1995 International Symposium on Optical Science, Engineering, and Instrumentation, 1995, San Diego, CA, United States

Abstract

The design of electron optical systems involves the calculation of electromagnetic fields to high accuracy. The first-order finite element method has been extensively used in electron optical design. In the design of magnetic lenses, for instance, discrepancies have been found between computed and measured fields. This discrepancy becomes larger as the saturation level is increased. Rapid variations of permeability with distance causes problems when using a first-order finite element method. These problems are overcome by the application of a second-order finite element method. The method also allows the easier modelling of curved electrodes.

Citation Download Citation

John Hodkinson and Khadija Tahir "Saturated electron lens design using a second-order finite element method", Proc. SPIE 2522, Electron-Beam Sources and Charged-Particle Optics, (25 September 1995); https://doi.org/10.1117/12.221587

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available