Stochastic interactions in particle-projection systems: comparison of theory and Monte Carlo simulations

Masis M. Mkrtchyan; Steven D. Berger; James Alexander Liddle; Lloyd R. Harriott

doi:10.1117/12.221594

25 September 1995 Stochastic interactions in particle-projection systems: comparison of theory and Monte Carlo simulations

Masis M. Mkrtchyan, Steven D. Berger, James Alexander Liddle, Lloyd R. Harriott

Author Affiliations +

Proceedings Volume 2522, Electron-Beam Sources and Charged-Particle Optics; (1995) https://doi.org/10.1117/12.221594
Event: SPIE's 1995 International Symposium on Optical Science, Engineering, and Instrumentation, 1995, San Diego, CA, United States

Abstract

Image blurring as a result of stochastic particle-particle interactions has been investigated for a particle projection system. A comparative analysis of the currently available analytical theories is presented. The results from these theories are also compared with Monte Carlo simulation results. Large variations in results and serious disagreements between the different theoretical approaches are found. The origin of the discrepancies arising from the earlier theories are understood and explained on the basis of our recently developed theory with two key concepts: consideration of nearest-neighbor interactions only, and a randomization length, over which the interactions are correlated.

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Masis M. Mkrtchyan, Steven D. Berger, James Alexander Liddle, and Lloyd R. Harriott "Stochastic interactions in particle-projection systems: comparison of theory and Monte Carlo simulations", Proc. SPIE 2522, Electron-Beam Sources and Charged-Particle Optics, (25 September 1995); https://doi.org/10.1117/12.221594

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