Is there any significant correlation between roughness and scattering near the Rayleigh limit?

Hendrik Rothe; Andre Kasper

doi:10.1117/12.218333

1 September 1995 Is there any significant correlation between roughness and scattering near the Rayleigh limit?

Hendrik Rothe, Andre Kasper

Proceedings Volume 2541, Optical Scattering in the Optics, Semiconductor, and Computer Disk Industries; (1995) https://doi.org/10.1117/12.218333
Event: SPIE's 1995 International Symposium on Optical Science, Engineering, and Instrumentation, 1995, San Diego, CA, United States

Abstract

Near or even beyond the Rayleigh-limit it is not possible to compute the surface PSD analytically. Since stray light measurements are an affordable approach for quality control in industry it has to be investigated, in which case they can be applied. Therefore a statistical method is proposed to determine, whether there is a significant correlation between roughness and scattering, or not. The method is proposed to determine, whether there is a significant correlation between roughness and scattering, or not. The method is tested with a newly developed rugged stray light sensor, several samples, and comparative measurements with an optical profiler.

Citation Download Citation

Hendrik Rothe and Andre Kasper "Is there any significant correlation between roughness and scattering near the Rayleigh limit?", Proc. SPIE 2541, Optical Scattering in the Optics, Semiconductor, and Computer Disk Industries, (1 September 1995); https://doi.org/10.1117/12.218333

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available