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From more than a decade now, the lasers have been applied to the synthesis and/ or the deposition of performnat thin films. The thin films are usually grown by laser chemical vapour deposition (LCVD). This method, however, suffers from the necessity of high-temperature substrate heating and usually resorts to dangerous gaseous precursors.
I. N. Mihailescu
"Pulsed laser deposition in a chemically reactive environment: application to the synthesis and deposition of high quality thin films", Proc. SPIE 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 27781W (1 September 1996); https://doi.org/10.1117/12.2298950
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I. N. Mihailescu, "Pulsed laser deposition in a chemically reactive environment: application to the synthesis and deposition of high quality thin films," Proc. SPIE 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 27781W (1 September 1996); https://doi.org/10.1117/12.2298950