A new method of high accuracy dynamic positioning using diode lasers

Jinsong Han

doi:10.1117/12.2299129

1 September 1996 A new method of high accuracy dynamic positioning using diode lasers

Jinsong Han

Proceedings Volume 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology; 27786U (1996) https://doi.org/10.1117/12.2299129
Event: 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 1996, Taejon, Korea, Republic of

Abstract

With liner frequency modulation property of a diode laser and the technique of dual-wavelength fine division, the zero OPD point of an interferometer is dynamically searched with a very high accuracy of 0.015 micrometer. Compared to that of the traditional white light positioning, the interferometer of diode laser positioning is simplified, and the searching range of the zero OPD point has been increased greatly.

Citation Download Citation

Jinsong Han "A new method of high accuracy dynamic positioning using diode lasers", Proc. SPIE 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 27786U (1 September 1996); https://doi.org/10.1117/12.2299129

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available