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We have reported a method to obtain the exact value of the phase shift and the phase distribution of the wavefront from phase shifted interferograms without additional information1,2). In the technique, the amount of the phase shift is estimated from all the interferograms with different amount of phase shift by a nonlinear least square estimation. To obtain the phases, an iterative calculation is used because of large number of unknowns of the equations. In this paper, the convergence of the estimation is examined as a function of the number of interferograms used for measurement and of the amount of total phase shift. |
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